![xps peak with a mg ka source xps peak with a mg ka source](https://pubs.rsc.org/image/article/2020/RA/d0ra07201j/d0ra07201j-f5_hi-res.gif)
spot size for Auger analysis, 3…30 keV primary energy Field emission electron gun, ~20 nm min.automated sample stage with probe tracking function.automatic UHV vacuum system, pressure typical 5*10 -7 Pa.UHV-coupling with 2 preparation chambers (heating, evaporation, scraping, sputter deposition).UHV vacuum system with a combination of Ti ion getter and an Ti sublimation pump, base pressure 10 -8 Pa (10 -10 Torr), fast load lock pumped with a turbomolecular pump, sample transfer between XPS and AES (and with glove box) without air exposure (p low energy electron flood gun for charge compensation.Ar+) for surface cleaning and depth profiling, 2 mm * 2 mm scan region, 1. sputtering with a SPECS IQ 12-38 ion gun typically by noble gas ions (e.g.sample holder 1 and 2 inch, computer-controlled sample tilt for automatic angle-resolved measurements.local analysis (best in the region of 100 µm) by a special lens-system, automatic map- and line-scan-analysis by a scanning system up to 2 mm * 2 mm, typical analysis region of 800 µm diameter.electron analysis with a 150 mm diameter hemisperical energy analyzer with 16-channel multi-channelplate detector, pass energy from 2.9 to 175 eV, best energy resolution at Ag3d = 0.8 eV.excitation by Al-Ka (1586.6 eV) or Mg-Ka (1253,6 eV) X-rays, monochromatized Al-Ka, or He-UV-radiation.The XPS system enables quantitative element analysis at surfaces of solid materials by spectroscopy of emitted photo electrons and gives information on the chemical states by analysis of peak-shifts or peak-shape changes. Lateral resolution < 1 nm, energy resolution about 1 eV. Lateral resolution = 0.5 %, correctness 30 % Lateral resolution = 5 (Bor), detection limit 0.5 %, correctness 20 % Single tilt low background (+- 40° tilt),ĭouble tilt low background with cooling (liquid N2), Performance of our Tecnai F30: Specimens: Integrated programmable user interface for all components.Energy dispersive X-ray spectrometer (EDXS) ( Edax/Ametek TEAM Octane T Optima EDS windowless).Scanning unit (STEM) with bright field (BF), dark field (DF), and high angle annular dark field (HAADF) detector.Operates at 300 kV accelerating voltage and is equipped with:
![xps peak with a mg ka source xps peak with a mg ka source](https://ars.els-cdn.com/content/image/1-s2.0-S1044580320322105-ga1.jpg)
Our transmission electron microscope Tecnai F30 (from Philips -> FEI Company -> Thermo Fisher Scientific) (300kV, FEG, TEM/STEM, GIF, EDX, HAADF, CCD)